电子行业用化学过滤器性能评价方法研究
摘要：化学过滤器的性能参数是用户在使用过程中对化学过滤器进行维护时的重要参考指标，然而实际使用时场景复杂，导致用户无法使用化学过滤器出厂时的性能参数来评估其实际使用情况。本文从化学过滤器的实际使用场景出发，总结了化学过滤器在实际使用中所遇到的问题；结合现有化学过滤器评价的相关规范和相关研究，给出了未来发展方向的建议。
关键词：化学过滤器气态分子污染物评价方法竞争吸附污染物浓度
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Study on performance evaluation methods of chemical filters applied to electronic industry
Abstract: The performance parameters of chemical filters are important reference indicators for users to maintain during use. However, the actual use scenarios are complex, which makes it impossible for users to use the performance parameters of chemical filters to reflect their performance when products are sold. Combined with the actual use scenarios of chemical filters, this paper summarizes the problems encountered in the actual use of chemical filters. Combined with the relevant norms and related research on the evaluation of existing chemical filters, the future development direction is given.
Keywords: chemical filter; airborne molecular contaminant; evaluation method; competitive adsorption; pollutant concentration;
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