洁净室OHS区域风速及邻近地板开孔率对气流的影响

作者：董连东徐瑾睿钱振张柯

单位：中国电子系统工程第二建设有限公司

摘要：以实际洁净室工程为研究对象，采用CFD技术模拟研究了空中行走式穿梭车(OHS)区域不同送风风速及其邻近区域地板开孔率对洁净室气流组织的影响。结果表明：随着OHS区域送风风速的增大，气流偏转区域呈现先减小后增大趋势，当送风风速为0.4 m/s时，偏转最小，气流接近垂直单向流；在x=293 m和x=334 m截面，OHS邻近区域地板开孔率分别为17%、25%时，整场气流接近垂直单向流。现场实测验证了模拟结果的准确性。

关键词：洁净室OHSCFD模拟送风风速地板开孔率气流组织

作者简介：董连东,男,1987年生,硕士研究生,工程师,所长214135无锡市新吴区具区路88号E-mail:dongliandong@cese2.com;
基金：国家重点研发计划项目“劳动密集型洁净厂房职业病危害防护技术与装备研发”(编号：2016YFC0801705);

尊敬的用户，本篇文章需要2元，点击支付交费后阅读

限时优惠福利：领取VIP会员
全年期刊、VIP视频免费!

参考文献[1] 职远，刘俊杰.电子洁净室气态化学污染环境控制规范分析[J].暖通空调，2020,50(5):49- 55.

[2] 卢光明，王尧.技术变革催生产业需求创新成为推动洁净室行业发展新引擎[J].洁净与空调技术，2016(2):79- 86.

[3] 全国洁净室及相关受控环境标准化技术委员会.洁净室及相关受控环境检测技术与应用：GB/T 36066—2018[S].北京：中国标准出版社，2018:8.

[4] 陈浩南，樊洪明，邵伯瑄.架空地板对洁净室气流组织影响的模拟研究[J].建筑热能通风空调，2020,39(8):31- 35.

[5] 沈靓晔，沈卫民，凌晨，等.参数与气流多组态的洁净空间模拟实验室设计与实现[J].暖通空调，2019,49(6):16- 21.

[6] 李九如，李想，陈巨辉，等.洁净室典型气流组织特性模拟[J].哈尔滨理工大学学报，2018,23(6):28- 32.

[7] 蔡增基，龙天渝.流体力学泵与风机[M].5版.北京：中国建筑工业出版社，2009:202- 207.

[8] 周正贵，王卫星.计算流体力学基础理论与实践[M].北京：科学出版社，2017:55- 65.

[9] LAUNDER B E,SPALDING D B.Lectures in mathematical models of turbulence[M].London:Academic Press,1972:160- 165.

Influence of OHS area air velocities and adjacent floor opening rates on airflow in cleanrooms

Dong Liong Xu Jinrui Qian Zhen Zhang Ke

(China Electronics System Engineering No.2 Construction Co., Ltd.)

Abstract: Taking an actual cleanroom project as the research object, the CFD technology is used to study the influence of OHS(over head shuttle) area air velocities and adjacent floor opening rates on the air distribution of the cleanroom. The results show that with the increase of air velocity in OHS area, the airflow deflection area first decreases and then increases. When the air velocity is 0.4 m/s, the deflection area is the smallest and the airflow is close to the vertical unidirectional airflow. When the floor opening rate of OHS adjacent area is 17% and 25%, respectively, at the section x=293 m and 334 m, the whole airflow is close to vertical unidirectional airflow. The accuracy of the simulation results is verified by field measurement.

Keywords: cleanroom; OHS (over head shuttle); CFD simulation; supply air velocity; floor opening rate; air distribution;

869 2 2