某芯片生产厂房净化空调设计

作者：马海龙

单位：永久保存本文请下载至本地信息产业电子第十一设计研究院科技工程股份有限公司西安分院

摘要：结合氮化镓功率放大器芯片厂房工程概况与工艺流程, 详细介绍了净化空调系统形式、空调负荷计算、净化风量确定、风机过滤器单元及干盘管的布置、灰区回风、新风量的确定及新风处理。阐述了温度、湿度、压差控制系统, 给出了相关节能措施。

关键词：净化空调风机过滤器单元新风机组干盘管自控

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参考文献[1]中国电子工程设计院.电子工业洁净厂房设计规范:GB 50472—2008[S].北京:中国计划出版社, 2008:19-20

[2]中国电子工程设计院.净化厂房设计规范:GB50073—2013[S].北京:中国计划出版社, 2013:19

[3]姚洪娥.某硅晶片生产厂房净化空调设计[J].暖通空调, 2010, 40 (4) :22-25

Clean air conditioning design for a chip production plant

(The IT Electronics Eleventh Design & Research Institute Scientific and Technological Engineering Co., Ltd., Xi’an Branch)

Abstract: Based on the project profile and process flow of a GaN power amplifier chip plant, presents the form of the clean air conditioning system, the calculation of cooling load, the determination of the clean air rate, the arrangement of fan filter unit (FFU) and dry coils, the return air in the grey area, the determination of the outdoor air rate and the outdoor air handling progress in detail.Elaborates the control systems of temperature, humidity and pressure difference, and presents the relevant energy saving measures.

Keywords: clean air conditioning; fan filter unit (FFU) ; outdoor air handling unit; dry coil; automatic control;

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